a5c-ai SEM-EDS Analyzer
Purpose
The SEM-EDS Analyzer skill provides comprehensive scanning electron microscopy and energy dispersive X-ray spectroscopy analysis for nanomaterial morphology and elemental composition characterization.
Capabilities
- Automated SEM image analysis
- EDS spectrum acquisition and quantification
- Elemental mapping and line scans
- Particle size from SEM images
- Surface morphology characterization
- Cross-section analysis
Usage Guidelines
SEM-EDS Analysis
Image Acquisition
- Optimize accelerating voltage for sample
- Select appropriate detector (SE, BSE)
- Minimize charging artifacts
EDS Analysis
- Acquire spectra at appropriate kV
- Apply ZAF corrections
- Generate elemental maps
Quantification
- Use standardless or standards-based
- Report detection limits
- Account for matrix effects
Process Integration
- Multi-Modal Nanomaterial Characterization Pipeline
- Nanodevice Integration Process Flow
- Nanolithography Process Development
Input Schema
{
"sample_id": "string",
"analysis_type": "imaging|eds_point|eds_map|line_scan",
"accelerating_voltage": "number (kV)",
"elements_of_interest": ["string"]
}
Output Schema
{
"morphology": {
"features": ["string"],
"measurements": [{"feature": "string", "value": "number", "unit": "string"}]
},
"composition": [{
"element": "string",
"weight_percent": "number",
"atomic_percent": "number"
}],
"elemental_maps": [{
"element": "string",
"image_path": "string"
}]
}